High performance slit-less spectrometer for soft x-ray emission spectroscopy
We have designed and constructed a new flat-field-type slit-less soft x-ray emission spectrometer that enables high detection efficiency and high energy resolution in the energy range of 250-1000 eV. The energy resolution is optimized in the C 1s and O 1s regions, where the maximum energy resolution of 2500 (E/ΔE) is expected using a focused beam whose spot size is 5 μm full width at half maximum