Cantilever-based sensor with integrated optical read-out using single mode waveguides
This work presents the design, fabrication and mechanical characterisation of an integrated optical read-out scheme for cantilever-based biosensors. A cantilever can be used as a biosensor by monitoring its bending caused by the surface stress generated due to chemical reactions occurring on its surface. Here, we present a novel integrated optical read-out scheme based on single-mode waveguides th