Pinhole-resistant nanocrystalline rutile TiO2 photoelectrode coatings
Atomic layer deposited (ALD) TiO2 thin films have a wide range of applications in photonics which are, however, limited by the chemical instability of the amorphous as-deposited TiO2. Post-deposition annealing is required for improving the performance by inducing phase transitions and oxide defects. ALD precursor traces remaining in the TiO2 film affect the thermally-induced processes but the unde