X-ray scattering studies of nanodot pattern formation on semiconductor surfaces by low energy ion beam sputtering
We show the capability of in-situ and ex-situ grazing-incidence small angle X-ray scattering (GISAXS) and diffraction (GID) techniques, using synchrotron radiation, to study the formation of self-organized nanodot patterns on semiconductor targets by ion beam sputtering (IBS). Particularly, surface nanopatterns of short-range hexagonal arrays of nanodots (as observed by atomic force microscopy ima